Technical Data
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Long 156mm travel slide motion performance |
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Resolution |
1.5μm |
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Repeatability |
0.1μm |
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Parasitic angular data obtained with laser autocollimator |
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Test range |
Pitch repeatability |
Yaw repeatability |
Pitch range |
Yaw range |
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0- |
±0.9μrad |
±0.6μrad |
50μrad |
24μrad |
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Parasitic straighness data obtained with Faro arm cmm |
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Test range |
Z range |
Y range |
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0- |
±13μm |
±16μm |