Axis |
Range |
Resolution |
Repeatability |
2nd crystal coarse pitch Stepper motor driven |
±0.9° |
0.45μrad |
±0.68μrad |
2nd crystal fine pitch Piezo driven |
210μrad |
<50nrad |
<<1μrad |
2nd crystal coarse roll Stepper motor driven |
±1.5° |
0.63μrad |
±0.51μrad |
2nd crystal fine roll Piezo driven |
160μrad |
<50nrad |
<<1μrad |
2nd crystal gap Translates 2nd crystal perpendicular to 1st crystal surface, used to maintain fixed offset |
16mm |
0.20μm |
±0.18μm |
Axis |
Range |
Resolution |
Repeatability |
2nd crystal coarse pitch Stepper motor driven |
±1° |
0.94μrad |
±0.46μrad |
2nd crystal fine pitch Piezo driven |
400μrad |
<50nrad |
<<1μrad |
2nd crystal coarse roll Stepper motor driven |
±1° |
1.31μrad |
±0.33μrad |
2nd crystal fine roll Piezo driven |
400μrad |
<50nrad |
<<1μrad |
2nd crystal gap Translates 2nd crystal perpendicular to 1st crystal surface, used to maintain fixed offset |
12mm |
0.20μm |
±0.20μm |
Horizontal X translation Translates between Si(111) and Si(311) crystals |
50mm |
0.63μm |
±0.50μm |