Axis |
Range |
Resolution |
Repeatability |
Speed |
Bragg Angle |
- |
0.16μrad /encoder step |
±0.5μrad |
0.2°/s |
Height |
10mm |
0.2μm /full step |
±0.7μm |
1mm/s |
Translation |
±1° |
1.15μrad /half step |
±0.9μrad |
3mm/s |
Tilt |
400μrad |
<50nrad |
<<1μrad |
0.2°/s |