motion |
range |
Resolution |
Repeatability |
X |
±100mm |
0.83μm |
±0.9μm |
Y |
200mm |
0.28μm |
±0.32μm |
Z |
±75mm |
0.83μm |
±0.6μm |
pitch |
±5° |
1.4μrad |
±0.8μrad |
yaw |
±10° |
0.4μrad |
±0.7μrad |