IDT have developed a hybrid actuator using the best available components all carefully
selected for the highest performance. The hybrid actuator provides coarse sub-micron
precision plus nanometre level positioning using an inline piezo. General actuator
features are as follows:-
175N linear load.
HV & UHV compatible.
Encoded using latest technology from Renishaw & other encoders from Jena & Mercury
.
2-3µm accuracy limit switches.
Coarse motion range up to 6mm with sub micron repeatability.
Fine motion range 60µm with high stiffness piezos and <10nm repeatability.
Lowest Abbe errors with inline piezo.
Offset drives for compact actuator.
Thermal breaks fitted throughout to minimise drift.
Technical Data
