idt
instrument design technology
Beamline Engineering Excellence
Low Load Actuator
This device has been developed with cost and compactness of footprint in mind. The
actuator has excellent repeatability plus many other features:-
- 100N linear load.
- HV & UHV compatible.
- Encoded using latest technology from Renishaw & other encoders from Jena & Mercury.
- 2- 3µm accuracy limit switches.
- Compact footprint.
Resolution
|
0.03μm
|
Repeatability
|
0.5μm
|
Technical Data